Intel’s New ASML Machines Show Promising Performance in Early Production

Intel (INTC.O) announced on Monday that the first two advanced lithography machines from ASML Holding (ASML.AS) are now fully operational in its factories. Early data suggests these machines are more reliable than previous models.

At a conference in San Jose, California, Intel’s senior principal engineer, Steve Carson, revealed that the company successfully produced 30,000 silicon wafers in a single quarter using ASML’s high numerical aperture (NA) lithography machines. These wafers serve as the foundation for thousands of computing chips.

Intel was the first chipmaker to receive these next-generation machines last year. The technology is expected to enable the production of smaller, faster chips compared to earlier ASML models. This marks a strategic shift for Intel, which had previously lagged behind competitors in adopting extreme ultraviolet (EUV) lithography.

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It took Intel seven years to fully integrate the previous generation of EUV machines into production, a delay that contributed to losing its lead to Taiwan Semiconductor Manufacturing Co (2330.TW). The company faced challenges with the reliability of those earlier EUV models during the initial rollout.

However, Carson noted that ASML’s new high NA machines have proven to be about twice as reliable as their predecessors in early testing.


We’re consistently producing wafers, which is a major advantage for the platform,” Carson said.

These new lithography machines, which use beams of light to print intricate patterns onto chips, also improve efficiency. Unlike earlier models that required multiple exposures to complete a process, the high NA machines can achieve the same results with just one exposure and significantly fewer processing steps.

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According to Carson, initial tests at Intel’s factories show that tasks requiring three exposures and approximately 40 processing steps with previous machines can now be accomplished with just a single exposure and only a handful of steps.

Intel plans to use these high NA machines to advance its 18A manufacturing technology, which is expected to begin mass production later this year with a new generation of PC chips. The company has also announced plans to fully integrate the machines into production for its upcoming 14A manufacturing technology, though it has not yet provided a timeline for mass production.

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